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 NameTool IdCategory1st responsibleTool rateManufacturerModel
View AFM - PSIA XE150AU04Surface analysisVictoria SternhagenBPSIAXE150
View ALDPT17Thin film depositionZhibin ZhangCPicosunR200
View ALD - F120PT15Thin film depositionTobias TörndahlCMicrochemistryF120
View ALD - inSEPT21Thin film depositionCarl HägglundBPicosun / WoollamP R200 / W RC2
View ALD - MP3PT19Thin film depositionTobias TörndahlC--
View BalanceAP32Sample preparationAmit PatelAMettlerToledo
View BalancePM19MetrologyErnesto Vargas CatalánADenver InstrumentXL410D
View BalancePM20MetrologyErnesto Vargas CatalánASartorusBP4100
View CAD / conversion workstationPL29LithographyÖrjan VallinA------
View CIGS evaporator - BAKPT10Thin film depositionMarika EdoffCBaltzersBAK 550
View CIGS evaporator - M. PilotePT12Thin film depositionTobias TörndahlDVon Ardenne---
View CZTS sputterPT20Thin film depositionCharlotte Platzer BjörkmanC--
View Diamond polishingAT17Transmission electron microscopy (TEM)Amit PatelAStruersDAP V
View Dicing SawPB01Backend processBjörn KuzavasBDiscoDAD 361
View Dimple GrinderAT06Transmission electron microscopy (TEM)Amit PatelAGatan656
View Dimple GrinderAT07Transmission electron microscopy (TEM)Amit PatelAGatan656
View Dip CoaterPC44Wet process & preparationLena KlintbergABungardRDC 21
View E-Beam evaporator - FlutterPT06Thin film depositionCharlotte Platzer BjörkmanCUU---
View E-beam/resisitive evaporator - BAPT14Thin film depositionCharlotte Platzer BjörkmanBBaltzersBA
View Electron Beam Lithograph EBLPL37LithographyÖrjan VallinDNanoBeam Ltd.nB5
View Ellipsometer "Rudolph"PM12MetrologyTomas NybergBRudolph Research---
View EmbedderAP03Sample preparationAmit PatelBBuehlerSimplimet
View ESCA IIAX02Chemical analysisAmit PatelCPhysical ElectronicsQuantera II
View Evaporator - cryo (restricted use)PT08Thin film depositionShuangshuang ZengAKurt J. Lesker CompanyPVD 75
View Evaporator - TMP (general use)PT07Thin film depositionShuangshuang ZengAKurt J. Lesker CompanyPVD 75
View Evaporator - UMSPT11Thin film depositionAdam HultqvistCBaltzersUMS
View Evaporator (C)AP17Sample preparationAmit PatelBPolaron---
View FIB/SEM - CrossbeamAF02Focused ion beam (FIB)Fredric EricsonDZeissZeiss Crossbeam 550
View FIB/SEM - DB235 CryoAF01Focused ion beam (FIB)Fredric EricsonDFEIStrata DB235
View Four Point ProbePM35MetrologyTomas NybergAOssilaT2001A3
View Four Point Probe - automaticPM21MetrologyTomas NybergAAITCMT-SR2000N
View Fume hood – acidsFC09Wet process & preparationErnesto Vargas CatalánA--
View Fume Hood - CBDPC48Wet process & preparationJonathan ScraggA------
View Fume Hood – KCNPC51Wet process & preparationJonathan ScraggA--
View Fume hood – solventsFC06Wet process & preparationErnesto Vargas CatalánA--
View FurnaceAT15Transmission electron microscopy (TEM)Amit PatelAHeraeus---
View GDOESAX04Chemical analysisCharlotte Platzer BjörkmanBSpectrumaGDA 750 HR
View Glass substrate cleanerPC52Wet process & preparationAmit PatelASemitool-
View Hot PlateAP31Sample preparationAmit PatelAHeidolphMR3003
View Hot PlateAT13Transmission electron microscopy (TEM)Amit PatelAHeidolphMR3003
View Hot PlatePL11LithographyRimantas BrucasASüss MicroTecHP8 BM
View Hot PlatePL12LithographyRimantas BrucasASüss MicroTecHP8 BM
View Hot PlatePL13LithographyRimantas BrucasABLE---
View HT Furnace - atmPD17Thermal processLena KlintbergAThermolyne---
View Hydraulic Press (w. heater)PB08Backend processLena KlintbergABungardRMP 210
View ICP-RIE (Si-DRIE / aluminum etch)PE01Dry etchMilena MoreiraDPlasmaThermSLR
View ICP-RIE (Si-DRIE) "Tegal"PE07Dry etchMilena MoreiraDTegal110 S/DE
View Image Reversal / Vapor Prime FurnacePL36LithographyRimantas BrucasAYield Engineering SystemsYES-58TA-E
View Ink Jet PrinterPB13Backend processZhibin ZhangBFuji FilmDimatix 2831
View Ion Beam EtcherPE11Dry etchÖrjan VallinBScientific Vacuum Systemsi6000 Milling System
View Ion Beam EtcherPE10Dry etchBjörn KuzavasAMSL-LKMark 1
View Ion Mill PIPSAT08Transmission electron microscopy (TEM)Amit PatelAGatanPIPS model 691
View Ion Polisher IlionAP34Sample preparationFredric EricsonAGatanllion II
View IR cameraPM18MetrologyÖrjan VallinAHamamatsuC2742
View Laser cutterPB17Backend processLena KlintbergCÖstlingAIO G+ 532 nm 5 W
View LOM - Leica DVM6 - Optical MicroscopeAU08Surface analysisVictoria SternhagenALeica MicrosystemsDVM6
View LOM - Olympus - Optical MicroscopeAU03Surface analysisVictoria SternhagenAOlympusAX70
View LOM - ZYGO - 3D Optical Profiler (CSI/PSI)AU07Surface analysisVictoria SternhagenAZYGONexView
View Mask Aligner - front / back side alignPL03LithographyRimantas BrucasCKarl SüssMA6 / BA6
View Mask Aligner - front side alignPL04LithographyRimantas BrucasCKarl SüssMA6
View Measuring Microscope with Digital ReadoutPM24MetrologyÖrjan VallinANikon/MetronicsMM-40/Quadra Chek 200
View Mo sputter - MRC IIPT13Thin film depositionCharlotte Platzer BjörkmanBMRC---
View NanoimprinterPL30LithographyRimantas BrucasDObducatNIL-6
View NanoindenterAU06Surface analysisUrban WiklundECSMUNHT
View Optical MicroscopeAT10Transmission electron microscopy (TEM)Amit PatelAReichert---
View Optical MicroscopeAT11Transmission electron microscopy (TEM)Amit PatelAReichert---
View Optical MicroscopePM01MetrologyRimantas BrucasALeitz Ergolux
View Optical MicroscopePM02MetrologyFredric EricsonALeitz---
View Optical MicroscopePM03MetrologyRimantas BrucasAOlympus---
View Optical MicroscopePM17MetrologyÖrjan VallinBNikonEclipse ME600
View Optical microscopePL39LithographyRimantas BrucasAOlympusMX63
View Optical Microscope (mask insp.)PL35LithographyÖrjan VallinANikonEclips L200ND
View Parylene CoaterPD16Thermal processLena KlintbergAParatechLab Top 3000
View Pattern GeneratorPL32LithographyÖrjan VallinBHeidelbergDWL 200
View PC12 - wet bench - StanglPC12Wet process & preparationErnesto Vargas CatalánB--
View PCB plotterPB18Backend processLena KlintbergBLPKFS104
View PECVDPT04Thin film depositionTobias TörndahlCOxford133
View Photomask ProcessorPL33LithographyÖrjan VallinBACPCapSpin
View Pick-&-Place (w. dispenser)PB06Backend processLena KlintbergALPKFProtoPlace S
View PL / EL Quantum YieldPM34MetrologyJonathan ScraggAEdinburgh InstrumentsFLS 1000
View Plasma CleanerAT09Transmission electron microscopy (TEM)Amit PatelAFischione---
View Plasma EtcherPE08Dry etchBjörn KuzavasAPlasma EtchPE-100
View Plasmastripper "New Lower"PE12Dry etchÖrjan VallinATepla300
View Plasmastripper "Upper"PE04Dry etchÖrjan VallinBTepla300
View Plating Station - pulse (Cu)PC42Wet process & preparationSven NorénALPKFMiniContac-RS
View PolisherAT05Transmission electron microscopy (TEM)Amit PatelAStruersDAP-V
View PolisherAT16Transmission electron microscopy (TEM)Amit PatelABuehlerEcomet 3
View PolisherAP06Sample preparationAmit PatelBBuehlerMetaserv
View PolisherAP07Sample preparationAmit PatelBBuehlerPhoenix
View Resist FurnacePL18LithographyRimantas BrucasAHeraeus---
View Resist FurnacePB12Backend processLena KlintbergABinder---
View Resist Furnace (110 C)PL16LithographyRimantas BrucasAMemmert---
View Resist Furnace (90 C)PL15LithographyRimantas BrucasAMemmert---
View Resist LaminatorPB10Backend processLena KlintbergABungardRLM 419 p
View Resist LaminatorPB16Backend processLena KlintbergAMEGA Electronics305
View Resist spinnerPL38LithographyÖrjan VallinAPolosSPIN 150i
View RIE (SiO / SiN)PE06Dry etchÖrjan VallinCAdvanced VacuumVision 320
View RTPPD15Thermal processCS_Si ChenBMPTCRTP-600S
View SawAP02Sample preparationAmit PatelBBuehlerIsomet
View Saw - low speedAP01Sample preparationAmit PatelBBuehlerIsomet
View Screen PrinterPB07Backend processLena KlintbergALPKFProtoPrint S
View ScriberPB14Backend processJes LarsenBBosch---
View SEM/EDS - 1530AS06Scanning electron Microscopy (SEM)Victoria SternhagenCCarl ZeissSEM
View SEM/EDS - 1550AS02Scanning electron Microscopy (SEM)Victoria SternhagenCZeissLEO1550
View SEM/EDS/EBSD - MerlinAS05Scanning electron Microscopy (SEM)Fredric EricsonCZeissMerlin
View Solder FurnacePB09Backend processLena KlintbergALPKFProtoFlow S
View Spectroscopic ellipsometerPM33MetrologyCarl HägglundCWoollamRC2-XI
View Spectroscopic reflectometer "K-MAC"PM31MetrologyÖrjan VallinAK-MACST4000-DLX
View Spin CoaterPL08LithographyRimantas BrucasBSüss MicroTecLabSpin6
View Spin CoaterPL09LithographyRimantas BrucasBKarl SüssRC8 (Gyroset)
View Spin CoaterPL10LithographyRimantas BrucasBBLEDelta 10
View Spin-Rinse-DryerPC47Wet process & preparationAmit PatelA------
View Spin-Rinse-DryerPC53Wet process & preparationÖrjan VallinASemitool470S with 102 controller
View Spin-Spray CoaterPL31LithographyRimantas BrucasBEVG101
View Spray EtcherPC45Wet process & preparationLena KlintbergASolectro---
View Sputter - magnetron "Lesker"PT09Thin film depositionTomas KubartDKurt J. Lesker CompanyCMS-18
View Sputter - magnetron "Von Ardenne"PT01Thin film depositionTomas NybergDVon ArdenneCS 730S
View Sputter - magnetron ZnO/CZTSPT16Thin film depositionJonathan ScraggBVon ArdenneCS 600
View Sputter - table-topPT22Thin film depositionTomas NybergBQuorumQ300TD plus
View Sputter Coater - Au/PdAP16Sample preparationAmit PatelBPolaronSC7640
View Stereo MicroscopePM25MetrologyÖrjan VallinANikonC-LEDS
View Stylus Profiler "Dektak 150"PM22MetrologyTomas NybergABruker / VeecoDektak 150
View Stylus Profiler "DektakXT"PM32MetrologyTomas NybergADektakXT
View Sulfoselenisation Furnace (SuSe)PD20Thermal processJonathan ScraggB------
View Sulfoselenisation RTP (Bettan)PD21Thermal processJes LarsenBDSeTec-
View TCO sputterPT18Thin film depositionTomas KubartDvon ArdenneCS730
View TEM/EDS - TitanAT18Transmission electron microscopy (TEM)Fredric EricsonDFEITitan Themis 200
View Tube Furnace - pipe 1PD19Thermal processUwe ZimmermannATemprex---
View Ultrasonic CleanerAP33Sample preparationAmit PatelABranson5510
View Ultrasonic CleanerAP28Sample preparationAmit PatelAMetason50
View Ultrasonic CleanerAT12Transmission electron microscopy (TEM)Amit PatelASonorex---
View Ultrasonic Disc CutterAT04Transmission electron microscopy (TEM)Amit PatelAGatan601
View UV ExposurePB11Backend processLena KlintbergABungardHellas-E
View Vac. / Vap. Prime FurnacePL14LithographyRimantas BrucasBStar2000
View Vacuum Leak TesterPO01Other processesBjörn KuzavasAAdixenASM 142
View Vacuum storage (large)PO03Other processesCharlotte Platzer BjörkmanA--
View Vacuum storage (small)PO04Other processesCharlotte Platzer BjörkmanA--
View Vertical Furnace - LPCVD (poly-Si, a-Si)PD08Thermal processÖrjan VallinCKoyo LindbergMicro TF-6LP
View Vertical Furnace - LPCVD (Si3N4, SiNx)PD09Thermal processÖrjan VallinCKoyo LindbergMicro TF-6LP
View Vertical Furnace - LPCVD (TEOS oxide)PD10Thermal processÖrjan VallinCKoyo LindbergMicro TF-6LP
View Vertical Furnace (general purpose)PD03Thermal processÖrjan VallinBKoyo LindbergMicro TF-6
View Vertical Furnace (high temp anneal)PD05Thermal processÖrjan VallinBKoyo LindbergMicro TF-6
View Vertical Furnace (metal anneal)PD07Thermal processÖrjan VallinBKoyo LindbergMicro TF-6
View Vertical Furnace (oxidation)PD01Thermal processÖrjan VallinAKoyo LindbergMicro TF-6
View Vertical Furnace (oxidation)PD02Thermal processÖrjan VallinAKoyo LindbergMicro TF-6
View Wet Bench - free acid / acid drain (KOH)PC18Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench - acidPL23LithographyRimantas BrucasBStangl---
View Wet Bench - acidPL24LithographyRimantas BrucasBStangl---
View Wet Bench - heating bathPC24Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench - heating bathPC26Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench - heating bath acidPC22Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench - high temp acidPC23Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench - high temp acidPC21Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench - hot platePC27Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench - Megasonic cleaningPC10Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench - solvent cleaningPL27LithographyRimantas BrucasAStangl-
View Wet Bench - Ultrasonic cleaningPC11Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench - Water rinsePL26LithographyRimantas BrucasBStangl-
View Wet Bench - work deskPL25LithographyRimantas BrucasBStangl---
View Wet Bench (acetone)PC25Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench (KOH / HF)PC19Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench (KOH-IPA / HF / warm rinse)PC20Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet bench (RCA1 / RCA2 / HF)PC14Wet process & preparationErnesto Vargas CatalánB--
View Wet Bench (RCA1 / RCA2 / HF)PC03Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench (RCA1 / RCA2 / HF)PC04Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench / E-beam resist developmentPL22LithographyÖrjan VallinBStangl---
View Wet Bench / E-beam resist hot-platePL21LithographyÖrjan VallinBStangl---
View Wet Bench / E-beam resist spinnerPL20LithographyÖrjan VallinBStangl / PolosSPIN 150i
View Wet Bench 7-upPC08Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench Acid surface treatmentsPC02Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench Etch and stripPC01Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench Metal etchingPC09Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench Oxide etchingPC07Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench Resist lift-offPC06Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench Solvent cleanPC05Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet GrinderAP04Sample preparationAmit PatelBBuehlerMetaserv
View Wet GrinderAP05Sample preparationAmit PatelBBuehlerMetaserv
View Wire Bonder - ballPB19Backend processRimantas BrucasBKulicke & Soffa4524A Digital
View Wire Bonder - ballPB02Backend processRimantas BrucasBKulicke & Soffa4522
View Wire Bonder - wedgePB03Backend processRimantas BrucasBKulicke & Soffa4526
View X-Ray Inspection StationPM26MetrologyBjörn KuzavasBNikonXT V 130
View XRFAX03Chemical analysisTobias TörndahlBPanalyticalEpsilon 5
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