Picture of Sputter - magnetron ZnO/CZTS
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WARNING
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DC and RF magnetron sputter system with two chambers sharing the same load-lock and transfer chamber. Max substrate size 5x5 cm2.

Chamber 1:  Cosputtering, also in sulphuric atmosphere, of CZTS and other sulphur containing compounds.

Chamber 2:  Deposition of ZnO and ZnO(Al).

Tool name:
Sputter - magnetron ZnO/CZTS
Area/room:
3R42 - FTE PV
Category:
Thin film deposition
Manufacturer:
Von Ardenne
Model:
CS 600
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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