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Direct Laser Writer (PL42)

Picture of Direct Laser Writer

Current status:

AVAILABLE

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Responsibles

1st Responsible:

Rimantas Brucas

2nd Responsible:

Files

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Description

Details

Tool name:

Direct Laser Writer

Area/room:

3R84 - EBL (e-strålelitografi)

Category:

Lithography

Manufacturer:

Kloé

Model:

Dilase 650

Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes

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