Picture of Spin-Rinse-Dryer
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Adam Hultqvist
2nd Responsible:
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Description

Separate tool owner - Restricted access - Contact tool responsible

Tool for substrate rinse and dry after clean. DIW only.

Details
Tool name:
Spin-Rinse-Dryer
Area/room:
3R09 - FTE PV
Category:
Wet process & preparation
Manufacturer:
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Model:
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Tool Modes
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