Picture of Spin-Rinse-Dryer
Current status:
AVAILABLE
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2nd Responsible:
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Tool for substrate rinse and dry after clean. DIW only.

Tool name:
Spin-Rinse-Dryer
Area/room:
3R09 - FTE PV
Category:
Wet process & preparation
Manufacturer:
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Model:
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Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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