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Nanoimprinter (PL30)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Rimantas Brucas
2nd Responsible:
Örjan Vallin
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Description
Details
Tool name:
Nanoimprinter
Area/room:
3R53 - backend
Category:
Lithography
Manufacturer:
Obducat
Model:
NIL-6
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