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SEM/EDS – Zeiss 1550 with AZtec EDS

High resolution FEG SEM for surface imaging equipped with an EDS system for element analysis. Equipped with InLens, SEII, and BSD detectors.


Schottky FEG, acceleration voltage 0.1 – 30 kV.
Detectors for secondary and backscattered electron imaging.
5-axis (x, y, z, tilt and rotation) motorized stage.
Resolution 1nm @ 20kV and 3nm @ 1kV.

EDS: 80mm2 Silicon Drift Detector with high sensitivity and for analysis at high count rates.
AZtec (INCA energy) software for X-ray mapping and element analysis.


The samples must be compatible with high vacuum. Outgassing samples must be pre-pumped in a separate pumping system. Powder samples must me prepared with care to avoid contamination of the gun column.

Tool name:
SEM / EDS "1550"
Area/room:
3R62 - SEM
Category:
Scanning electron Microscopy (SEM)
Manufacturer:
Zeiss
Model:
LEO1550
Max booking time, day:
4 hours
Max booking time, night:
hours
No. of future bookings:
2

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