Picture of Vertical Furnace - LPCVD (poly-Si, a-Si)
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LPCVD: poly-Si Tset + gasflow

Tool name:
Vertical Furnace - LPCVD (poly-Si, a-Si)
Area/room:
3R76 - High Temp. Proc.
Category:
Thermal process
Manufacturer:
Koyo Lindberg
Model:
Micro TF-6LP
Max booking time, day:
3 hours
Max booking time, night:
4 hours
No. of future bookings:
4

SiH4  →    Si  +    2 H2

The SiH4 cylinder is placed on the left in the leftmost container at the gable end of the clean room. 

The SiH4 has an pneumatic interlock in the visitor's corridor at the gable end of the clean room. This have to be re-activated after any power failure.

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