Picture of E-beam/resisitive evaporator - BA
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E-beam & resistive evaporator (Ni/Al, NaF, MgF2).

System for e-beam evaporation of Al, Ni and Cu. Other metals allowed in liners. Also MgF2 and NaF from resistive source.

E-beam source with four positions (rotation) and one position for resistive evaporation. QCM for rate control.

Tool name:
E-beam/resisitive evaporator - BA
Area/room:
3R07 - FTE PV
Category:
Thin film deposition
Manufacturer:
Baltzers
Model:
BA
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hours
Max booking time, night:
hours
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