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PSIA XE150 SPM/AFM

The AFM uses a cantilever with a sharp tip (probe) at its end to scan a sample surface. Data obtained depends on the mode used. 

Atomic Resolution
Non-Contact AFM (NC-AFM)
Contact AFM (C-AFM)
Dynamic Force Microscopy (DFM) - Hybrid of C-AFM / NC-AFM
Lateral Force Microscopy (LFM)
Electrostatic Force Microscopy (EFM)
 
PSIA XEC, XEP (data collection), XEI (image processing) software
XY and Z scanners separated
Max XY-scan area: 100x100 um
Max Z-scan range: 12 um
Motorized stage accomodates small specimen up to 4” wafer
CCD Camera
Optical 10X objective lens yields about 500x magnification
Enhanced Acoustic Enclosure & Active Vibration Isolation System
Tool name:
AFM
Area/room:
3R88 Surface characterization
Category:
Surface analysis
Manufacturer:
PSIA
Model:
XE150
Max booking time, day:
8 hours
Max booking time, night:
13 hours
No. of future bookings:
3

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