Picture of Optical Microscope
Current status:
AVAILABLE
Book | Log
Show/Collapse all

1st Responsible:
2nd Responsible:
You must be logged in to view files.

Basic Information / Capabilities

This Olympus microscope has both transmitted & reflected light and can be used for quick observations of buth photomasks as large as 5" wafers up to 4".

Technical Specification

5x, 10x, 20x, 50x, & 100x objectives

Light field and darkfield

Performance

---

Restrictions

---

Chemistry / Materials

---

 

Tool name:
Optical Microscope
Area/room:
3R81 - litografi
Category:
Metrology
Manufacturer:
Olympus
Model:
---

Instructors

Licensed Users

You must be logged in to view tool modes.