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Spin Coater (PL08)

Picture of Spin Coater

Current status:

AVAILABLE

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Responsibles

1st Responsible:

Rimantas Brucas

2nd Responsible:

Files

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Description

Photoresist spinner. Su8 spinning not alowed.

Details

Tool name:

Spin Coater

Area/room:

3R81 - litografi

Category:

Lithography

Manufacturer:

Süss MicroTec

Model:

LabSpin6

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Tool Modes

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