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Resist Furnace (PL18)

Picture of Resist Furnace

Current status:

AVAILABLE

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Responsibles

1st Responsible:

Rimantas Brucas

2nd Responsible:

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Description

Heraeus

Details

Tool name:

Resist Furnace

Area/room:

3R74 - jonets / solgel spinning

Category:

Lithography

Manufacturer:

Heraeus

Model:

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