Picture of Resist Furnace
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
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Heraeus

Tool name:
Resist Furnace
Area/room:
3R74
Category:
Lithography
Manufacturer:
Heraeus
Model:
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Max booking time, day:
3 hours
Max booking time, night:
4 hours
No. of future bookings:
4

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