Picture of Ion Beam Etcher
Current status:
AVAILABLE
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1st Responsible:
2nd Responsible:
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Tool name:
Ion Beam Etcher
Area/room:
3R44 - Etch & Thin Film
Category:
Dry etch
Manufacturer:
MSL-LK
Model:
Mark 1
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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