Picture of SEM / EDS / EBSD "Merlin"
Current status:
WARNING
Book | Log
Show/Collapse all

1st Responsible:
2nd Responsible:
You must be logged in to view files.

 

SEM/EDS/EBSD – Zeiss Merlin with AZtec EDS/EBSD

High resolution FEG SEM for surface imaging equipped with an EDS system for element analysis and EBSD system for crystal orientation mapping.


Schottky FEG, acceleration voltage 0.02 – 30kV.
Detectors for secondary and backscattered electron imaging.
5-axis (x, y, z, tilt and rotation) motorized stage.
Resolution 0.8nm @ 15kV and 1.4nm @ 1kV.

EDS: X-Max 80mm2 Silicon Drift Detector with high sensitivity and for analysis at high count rates.
AZtec (INCA energy) software for X-ray mapping and element analysis.
EBSD: Nordlys Max detector, AZtec HKL software.


The samples must be compatible with high vacuum. Outgassing samples must be pre-pumped in a separate pumping system.

Tool name:
SEM / EDS / EBSD "Merlin"
Area/room:
3R62 - SEM & FIB
Category:
Scanning electron Microscopy (SEM)
Manufacturer:
Zeiss
Model:
Merlin
Max booking time, day:
4 hours
Max booking time, night:
hours
No. of future bookings:
2

Instructors

Licensed Users

You must be logged in to view tool modes.