Basic Information / Capabilities

This Zeiss Merlin SEM is a high resolution FEG instrument for surface imaging, equipped with an EDS system for element analysis and an EBSD system for crystal orientation mapping.

Technical Specification

Schottky FEG

Acceleration voltage: 20 V - 30 kV

5-axis (x, y, z, tilt and rotation) motorized stage

Detectors for secondary and backscattered electron imaging

EDS: X-Max 80 mm² Silicon Drift Detector with high sensitivity and for analysis at high count rates

AZtec (INCA energy) software for X-ray mapping and element analysis

EBSD: Nordlys Max detector, AZtec HKL software

Performance

Resolution: 0.8 nm (15 kV) / 1.4 nm (1kV)

Restrictions

•  Sample size restrictions: ???.

•  Samples must be compatible with high vacuum.

•  Outgassing samples must be pre-pumped in a separate pumping system.

Chemistry / Materials

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