Basic Information / Capabilities

Ilion is a compact dual-beam system engineered to produce high-quality cross-section SEM specimens.In addition to cross-section preparation, it can also be used for planar polishing.

Technical specification

Factory calibrated Ion gas flow ( Ar⁺) for optimum gas flow.

Duel  beam system with independently controlled ion guns and a speciman mount to load and unload samples without venting the main chamber.

Possibility to cool sample with LN2.

Touch screen interface to controll the operation.

Digital Zoom Microscope software and a digital camera allows for in-situ observation of the sample and to take images.

Acceleration voltage: 0.1 to 8 kV

Beam incidence: Shallow-angle milling for cross-sectioning and normal-incidence for planar polishing.

Ion-Beam modulation: Cross section (Single modulation), Planar, Dual modulation, stationary right and stationary left.

Performance

Restrictions