Picture of Vertical Furnace (metal anneal)
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Örjan Vallin
2nd Responsible:
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Description

Post metal anneal in N2 or forming gas (5% H2 in N2) at maximum 800°C.

Gases: N2 (GA010), N2 (GA012), H2 5% in N2 (GA220)

Details
Tool name:
Vertical Furnace (metal anneal)
Area/room:
3R76o - diffusion (HT-proc)
Category:
Thermal process
Manufacturer:
Koyo Lindberg
Model:
Micro TF-6
Process info

In order to run recipe with forming gas, N2 valve must be opened simultanesously in that recipe.

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