Picture of Plasmastripper "Upper"
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Tepla 300

The Tepla 300 is a barrel reactor using microwave power. It is intended for de-scum and stripping (aka ashing) of resist.

There are several recipes for stripping and de-scum.

 

 

Tool name:
Plasmastripper "Upper"
Area/room:
3R44 - Etch & Thin Film
Category:
Dry etch
Manufacturer:
Tepla
Model:
300
Max booking time, day:
3 hours
Max booking time, night:
14 hours
No. of future bookings:
4

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