Basic Information / Capabilities
The FEI/Thermo Fisher Titan Themis 200 is an aberration-corrected, high-resolution S/TEM optimized for atomic-scale structural and chemical analysis. It features an X-FEG high-brightness electron source, advanced Cs-corrected STEM and TEM optics, SuperX (Gen-2) windowless EDS for high-sensitivity X-ray spectroscopy, and the CEOS CEFID post-column energy filter enabling high-resolution EELS and zero-loss filtered imaging with extremely low non-isochromaticity.
Technical Specification
Electron Optics
- X-FEG high brightness Schottky emitter
- Operating voltage 80–200 kV
- Spherical aberration correction (Cs) for STEM (DCOR+ from CEOS)
- TEM information limit down to ≤ 1.1 Å (200 kV typical).
- STEM resolution down to ≈0.8 Å (200 kV) & ≈1.4 Å (80 kV)
Detectors
- SuperX Energy-Dispersive X-ray Spectrometer (EDS), Generation 2
- Four symmetrically mounted SDD detectors.
- High solid angle (≈0.7 srad) and output count rates up to ~200 kcps.
- High sensitivity for rapid EDS mapping and detection down to B
- HAADF / ADF/ BF STEM detectors for Z-contrast imaging.
- 4k×4k CMOS camera (CETA family) for TEM imaging and diffraction.
Energy Filter (Post-Column): CEOS CEFID
- CEOS Energy Filtering and Imaging Device (CEFID) installed post-column.
Key capabilities include:
- Extremely low non-isochromaticity (NI) enabling high-precision energy-filtered TEM (EFTEM).
- Dispersion >5.2 μm/eV at 200 kV
- Suitable for zero-loss filtering, core-loss EELS, and large-field ESI imaging.
- Supports variable post-slit magnifications and flexible EELS ranges (8–4096 eV with 4k×4k detectors).
- Hybrid pixel camera (ELA from Dectris)
Stage and Holders
- Piezo-controlled 5-axis stage enabling sub-Å drift stability for atomic-scale analysis.
- Compatible with tomography, double-tilt, cryo, heating, electrical biasing holders.
Restrictions
- Requires high-quality, electron-transparent TEM specimens (typical thickness <100 nm depending on material).
- High vacuum operation; samples must be vacuum compatible.