Picture of Vertical Furnace - LPCVD (TEOS oxide)
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LPCVD: SiO2 (TEOS) Tset + gasflow

Tool name:
Vertical Furnace - LPCVD (TEOS oxide)
Area/room:
3R76 - High Temp. Proc.
Category:
Thermal process
Manufacturer:
Koyo Lindberg
Model:
Micro TF-6LP
Max booking time, day:
3 hours
Max booking time, night:
4 hours
No. of future bookings:
4

Recipe 1 deposits at 9 nm/min.

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