Electron Column (SEM)

• Gemini II SEM column with high-resolution Schottky FEG source.
• Acceleration voltage: 0.2–30 kV, optimized low-kV performance for high-contrast imaging.

Ion Column (FIB)

• Ion-Sculptor Ga-LMIS FIB column (0.5–30 kV).
• Beam currents from 1 pA to 100 nA for precision milling and fast material removal.
• Column geometry: 54° angle between SEM and FIB.

Stage

• 6-axis super-eucentric motorized stage (X, Y, Z, M, Tilt, Rotation).
• Large travel ranges (e.g., X/Y up to 100 mm).

Detectors

• InLens SE detector
• InLens ESB (energy-selective backscatter) detector
• Everhart-Thornley SE detector
• Retractable BSE detector (BSD4 style depending on configuration)
• STEM-in-SEM / aSTEM modes (institution-dependent)

Analytical Tools

• Oxford EDS systems Ultim Max 100 SDD

Gas Injection System (GIS)

• Pt, W, Carbon,XeF2, Water GIS standard.

Software

• Zeiss Atlas 5 for 2D large-area mapping, 3D tomography, and correlative workflows.
• SmartSEM for SEM operation
• SmartFIB for FIB operation

Performance

• SEM resolution: <5 nm features resolvable at optimal kV.
• High-quality low-kV imaging due to Gemini optics and ESB detector.
• High-throughput FIB milling with up to 40% faster processing using intelligent scanning strategies.

Restrictions

• High-vacuum only SEM chamber; samples must be vacuum-compatible.
• Outgassing or wet samples require pre-treatment 
• Stage travel supports 100 mm-class samples; very large wafers may not be fully compatible for the Load loack
• Powder and loose materials must be prepared carefully to avoid FIB/SEM contamination. (N2 blowing before insertion)