PT22 - Table-top sputter
The Q300TD plus is a table-top sputter from Quorum that is capable of sputter deposit metallic films up to 4 inch wafers.
It has two targets which enables sequential sputtering without breaking the vacuum.
Standard target materials provided by Myfab-U: Au, Cr, Cu, Pt, Al and Ti. Requests for other target materials must be discussed with and approved by lab staff.