PT22 - Table-top sputter

The Q300TD plus is a table-top sputter from Quorum that is capable of sputter deposit metallic films up to 4 inch wafers.

It has two targets which enables sequential sputtering without breaking the vacuum.

Standard target materials provided by Myfab-U:  Au, Cr, Cu, Pt, Al and Ti. Requests for other target materials must be discussed with and approved by lab staff.