Picture of Sputter - table-top
Current status:
AVAILABLE
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PT22 - Table-top sputter


The Q300TD plus is a table-top sputter from Quorum that is capable of sputter deposit metallic films up to 4 inch wafers.

It has two targets which enables sequential sputtering without breaking the vacuum.

Standard target materials provided by Myfab-U:  Au, Cr, Cu, Pt, Al and Ti. Requests for other target materials must be discussed with and approved by lab staff.

Tool name:
Sputter - table-top
Area/room:
[Not defined]
Category:
Thin film deposition
Manufacturer:
Quorum
Model:
Q300TD plus
Max booking time, day:
3 hours
Max booking time, night:
14 hours
No. of future bookings:
4

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