Picture of Four Point Probe - automatic
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AVAILABLE
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Main features: Automatic/Manual measurement range selection; Remote control by operating software; Auto contact system; Auto range selection; Full remote control; Data Analysis software under Windows environment. Specification 1. Sheet resistance Measuring method: Contact by 4-point probe, Measuring range: 1 mohm/sq - 2 Mohm/sq. 2. Resistivity Measuring method: Contact by 4-point probe (Input thickness), Measuring range: 10.0 µohm•cm - 200.0 Kohm•cm. 3. Measurement accuracy ±0.5% (VLSI Standard wafer, when 23°C. 4. Specimen (Wafer) max 8"; Rectangular (140mm x 140mm). 5. Measuring time Approx. 4 sec/point.

Tool name:
Four Point Probe - automatic
Area/room:
3R53
Category:
Metrology
Manufacturer:
AIT
Model:
CMT-SR2000N
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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