Picture of Stylus Profiler "Dektak 150"
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Dektak 150

The Dektak 150 is a profilometer. It measures step heights, surface roughness, etc by means of a stylus in contact with the measured surface.

Relatively large surfaces like e.g. a silicon wafer can be scanned. The result can be presented as a curve for one scan. Several parallel scans can be presented as a 2-D topographic picture or as a 3-D picture.

Stylus with different radii is available.

 

It is also possible to do stress measurements.

Tool name:
Stylus Profiler "Dektak 150"
Area/room:
3R51 White light MEMS lab.
Category:
Metrology
Manufacturer:
Bruker / Veeco
Model:
Dektak 150
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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