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Current status:
AVAILABLE
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Mechanical and laser scribing tool

Tool for patterning of glass substrates with metals or conducting oxides.

Innolas ns solid-state laser (532 nm) with 8 W maximum power. Pattern defined by programmable XY-table. Linewidth approx 50 um. Max substrate size 30x27.5 cm2.

Tool name:
Scriber
Area/room:
3R07 - FTE PV
Category:
Backend process
Manufacturer:
Bosch
Model:
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