Basic Information / Capabilities

This Korea Materials & Analysis Corp. (K-MAC) ST4000-DLX is a spectroscopic reflectometer for thin film thickness measurements for thin films that are transparent in at least some part of the visual light spectrum

Technical Specification

5 x and 10x objectives

Analysis software capable of modelling up to three layers on top as well as three layers at back of substrate

Performance

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Restrictions

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Chemistry / Materials

Typically dielectrics e.g., silicon dioxide and nitrides and polymers. A comprehensive library of such materials are available in the analysis software. Other mateials can be added from literature values or ellipsometer measurements