Spectroscopic ellipsometry (SE) tool purchased for the ALD-inSE reactor but available on the ex situ variable angle stage on a regular basis.

If the current status is WARNING, the SE is installed on the ALD reactor.

If the current status is AVAILABLE, the SE is installed on the ex situ stage.

The ellipsometer is a Woollam RC2 with a spectral range from 210 to 1690 nm.