Basic Information

The RC2-XI Woolllam Spectroscopic Ellipsometer has been purchased for the ALD-inSE reactor, but it is available on the ex-situ variable angle stage on a regular basis (see status infomation below). 

Technical Specification

• Dual rotating compensators.
   
• Light wavelength range:  210nm to 1690nm.
   
• Auto-align available.
   
• No in-plane stage or sample movement. 

Applications

• Low bandgap semiconductors.
   
• Thin film characterization. Spectroscopic ellipsometry is very sensitive to the presence of surface layers on the order of just a fraction of a nanometer.
   
• Allows for standard spectroscopic ellipsometry measurements (SE), generalized ellipsometry measurements (g- SE), and the entire Mueller matrix (MM-SE).
   
• Measurements of reflactance and transmitance, including anisotropic terms such as like- and cross-polarized intensities.

Status Infomation

If the current status is WARNING, the SE is installed on the ALD reactor.

If the current status is AVAILABLE, the SE is installed on the ex situ stage.