Basic information

The Quantera II is an Ultra high vacuum system, fully automated X-ray Photoelectron Spectroscopy (XPS/ESCA). It includes large and micro-area spectroscopy, sputter depth profiling, automated angle dependent depth profiling and electron imaging for rapid locations of small samples features.

Technical specification

X-ray source: Monochromated Al Kα

High-Transmission Hemisperical analyzer with a multi-channel detection array.

SXI (scanning X-ray imaging).

Neuetralisation for insulate samples.

Ion gun for presuttering (Ar⁺) and depth profiling.

SmartSoft-XPS 

Performance

Energy resolution: < .45eV

Surface sensitivity: ~5-10nm

Spot size: 7,5 um - 200 um

Restrictions

Max sample size: 75 x 75 mm

Sample must be compatible with ultra high vacuum.