Rudolph Research

RUDOLPH AutoEL II is a single wavelength, variable angle, microcomputer-controlled automatic-nulling ellipsometer providing easy-to-use approach for accurately measuring a wide variety of films (film thickness and refractive index). The ellipsometer measures the change in state of polarized light upon reflection from a surface. The state of polarization is determined by the amplitude ratio, tan(Ψ), of the parallel (p) and perpendicular (s) components of radiation, and the phase shift difference, ?, between the two components. These quantities are used to automatically calculate the physical quantities of thickness and refractive index of the film.

Requirements to samples: the sample must be composed of a small number of discrete, well-defined layers that are optically homogeneous and isotropic.

Specifications:

• He:Ne laser, 633 nm wavelength
• The angle of incidence is set for 70° for standard applications
• Film thickness measurement resolution 3-10 Å
• Refractive index measurement resolution 0.01