SEM – Zeiss 1530
High resolution FEG SEM for surface imaging. Equipped with InLens, SEII, and BSD detectors.
Schottky FEG, acceleration voltage 0.1 – 30 kV.
Detectors for secondary and backscattered electron imaging.
Compucentric motorized stage, manual tilt.
Resolution 1nm @ 20kV and 3nm @ 1kV.
The samples must be compatible with high vacuum. Outgassing samples must be pre-pumped in a separate pumping system. Powder samples must me prepared with care to avoid contamination of the gun column.