Picture of SEM / EDS "1530"
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SEM – Zeiss 1530

High resolution FEG SEM for surface imaging. Equipped with InLens, SEII, and BSD detectors.

Schottky FEG, acceleration voltage 0.1 – 30 kV.
Detectors for secondary and backscattered electron imaging.
Compucentric motorized stage, manual tilt.
Resolution 1nm @ 20kV and 3nm @ 1kV.


The samples must be compatible with high vacuum. Outgassing samples must be pre-pumped in a separate pumping system. Powder samples must me prepared with care to avoid contamination of the gun column.

Tool name:
SEM / EDS "1530"
Area/room:
3R59 - ESCA & SEM
Category:
Scanning electron Microscopy (SEM)
Manufacturer:
Carl Zeiss
Model:
SEM
Max booking time, day:
4 hours
Max booking time, night:
hours
No. of future bookings:
2

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