Basic Information / Capabilities

The MX63 microscope system is optimized for high-quality inspections of wafers as large as 300 mm. The ergonomic microscope, high resolution camera in combination with PRECiV image analysis software alove’ versatile observation capabilities and provide clear, sharp images for reliable detect defection in the samples.

MIX observation technology can produce observation images by combining darkfield with another observation method, such as brightfield, fluorescence, or polarization. MIX observation enables users to view defects that are difficult to see with conventional microscopes. 

Technical Specification

2.5x, 5x, 10x, 20x, 50x, & 100x objectives

Brightfield and darkfield, Normarski contrast

Filters for photosensitive materials

Imaging and measurements software

Performance

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Restrictions

Only users with LitoChem accsess are allowed to use this microscope

Chemistry / Materials

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