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EBL (e-beam litho) - NBL (PL37)

Picture of EBL (e-beam litho) - NBL

Current status:

AVAILABLE

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Responsibles

1st Responsible:

Örjan Vallin

2nd Responsible:

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Description

Details

Tool name:

EBL (e-beam litho) - NBL

Area/room:

3R84s - EBL (e-strålelitografi)

Category:

Lithography

Manufacturer:

NanoBeam Ltd.

Model:

nB5

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