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 NameTool IdCategory1st responsibleTool rateManufacturerModel
View 2-photon writerPA01Additive manufacturingMilena MoreiraCUpNanoUp250
View 3D Optical Profiler ZYGOAU07Surface analysisAmit PatelAZYGONexView
View AFM - PSIA XE150AU04Surface analysisAmit PatelBPSIAXE150
View ALDPT17Thin film depositionZhibin ZhangCPicosunR200
View ALD - F120PT15Thin film depositionTobias TörndahlCMicrochemistryF120
View ALD - inSEPT21Thin film depositionCarl HägglundBPicosun / WoollamP R200 / W RC2
View ALD - MP3PT19Thin film depositionTobias TörndahlC--
View BalanceAP32Sample preparationAmit PatelAMettlerToledo
View BalancePM19MetrologyErnesto Vargas CatalánADenver InstrumentXL410D
View BalancePM20MetrologyErnesto Vargas CatalánASartorusBP4100
View CAD / conversion workstationPL29LithographyÖrjan VallinA------
View CIGS evaporator - BAKPT10Thin film depositionMarika EdoffCBaltzersBAK 550
View CIGS evaporator - M. PilotePT12Thin film depositionTobias TörndahlDVon Ardenne---
View CZTS sputterPT20Thin film depositionCharlotte Platzer BjörkmanC--
View Diamond polishingAT17Transmission electron microscopy (TEM)Amit PatelAStruersDAP V
View Dicing SawPB01Backend processErnesto Vargas CatalánBDiscoDAD 361
View Dimple GrinderAT06Transmission electron microscopy (TEM)Amit PatelAGatan656
View Dimple GrinderAT07Transmission electron microscopy (TEM)Amit PatelAGatan656
View Dip CoaterPC44Wet process & preparationLena KlintbergABungardRDC 21
View E-Beam evaporator - FlutterPT06Thin film depositionCharlotte Platzer BjörkmanCUU---
View E-beam/resisitive evaporator - BAPT14Thin film depositionCharlotte Platzer BjörkmanBBaltzersBA
View Electron Beam Lithograph EBLPL37LithographyÖrjan VallinDNanoBeam Ltd.nB5
View Ellipsometer "Rudolph"PM12MetrologyTomas NybergBRudolph Research---
View EmbedderAP03Sample preparationAmit PatelBBuehlerSimplimet
View ESCA IIAX02Chemical analysisAmit PatelCPhysical ElectronicsQuantera II
View Evaporator - cryo (restricted use)PT08Thin film depositionTomas NybergAKurt J. Lesker CompanyPVD 75
View Evaporator - TMP (general use)PT07Thin film depositionTomas NybergAKurt J. Lesker CompanyPVD 75
View Evaporator - UMSPT11Thin film depositionAdam HultqvistCBaltzersUMS
View Evaporator (C)AP17Sample preparationAmit PatelBPolaron---
View FIB/SEM - CrossbeamAF02Focused ion beam (FIB)Fredric EricsonDZeissZeiss Crossbeam 550
View FIB/SEM - DB235 CryoAF01Focused ion beam (FIB)Fredric EricsonDFEIStrata DB235
View Four Point ProbePM35MetrologyTomas NybergAOssilaT2001A3
View Four Point Probe - automaticPM21MetrologyTomas NybergAAITCMT-SR2000N
View Fume hood – acidsFC09Wet process & preparationErnesto Vargas CatalánA--
View Fume Hood - CBDPC48Wet process & preparationJonathan ScraggA------
View Fume Hood – KCNPC51Wet process & preparationJonathan ScraggA--
View Fume hood – solventsFC06Wet process & preparationErnesto Vargas CatalánA--
View FurnaceAT15Transmission electron microscopy (TEM)Amit PatelAHeraeus---
View GDOESAX04Chemical analysisCharlotte Platzer BjörkmanBSpectrumaGDA 750 HR
View Glass substrate cleanerPC52Wet process & preparationAmit PatelASemitool-
View Hot PlateAP31Sample preparationAmit PatelAHeidolphMR3003
View Hot PlateAT13Transmission electron microscopy (TEM)Amit PatelAHeidolphMR3003
View Hot PlatePL11LithographyRimantas BrucasASüss MicroTecHP8 BM
View Hot PlatePL12LithographyRimantas BrucasASüss MicroTecHP8 BM
View Hot PlatePL13LithographyRimantas BrucasABLE---
View HT Furnace - atmPD17Thermal processLena KlintbergAThermolyne---
View Hydraulic Press (w. heater)PB08Backend processLena KlintbergABungardRMP 210
View ICP-RIE (Si-DRIE / aluminum etch)PE01Dry etchErnesto Vargas CatalánDPlasmaThermSLR
View ICP-RIE (Si-DRIE) "Tegal"PE07Dry etchErnesto Vargas CatalánDTegal110 S/DE
View Image Reversal / Vapor Prime FurnacePL36LithographyRimantas BrucasAYield Engineering SystemsYES-58TA-E
View Ink Jet PrinterPB13Backend processZhibin ZhangBFuji FilmDimatix 2831
View Ion Beam EtcherPE10Dry etchBjörn KuzavasAMSL-LKMark 1
View Ion Beam EtcherPE11Dry etchÖrjan VallinBScientific Vacuum Systemsi6000 Milling System
View Ion Mill PIPSAT08Transmission electron microscopy (TEM)Amit PatelAGatanPIPS model 691
View Ion Polisher IlionAP34Sample preparationFredric EricsonAGatanllion II
View IR cameraPM18MetrologyÖrjan VallinAHamamatsuC2742
View Laser cutterPB17Backend processLena KlintbergCÖstlingAIO G+ 532 nm 5 W
View LOM - Leica DVM6 - Optical MicroscopeAU08Surface analysisAmit PatelALeica MicrosystemsDVM6
View LOM - Olympus - Optical MicroscopeAU03Surface analysisAmit PatelAOlympusAX70
View Mask Aligner - front / back side alignPL03LithographyRimantas BrucasCKarl SüssMA6 / BA6
View Mask Aligner - front side alignPL04LithographyRimantas BrucasCKarl SüssMA6
View Measuring Microscope with Digital ReadoutPM24MetrologyÖrjan VallinANikon/MetronicsMM-40/Quadra Chek 200
View Mo sputter - MRC IIPT13Thin film depositionCharlotte Platzer BjörkmanBMRC---
View NanoimprinterPL30LithographyRimantas BrucasDObducatNIL-6
View NanoindenterAU06Surface analysisUrban WiklundECSMUNHT
View Optical MicroscopeAT10Transmission electron microscopy (TEM)Amit PatelAReichert---
View Optical MicroscopeAT11Transmission electron microscopy (TEM)Amit PatelAReichert---
View Optical MicroscopePM01MetrologyRimantas BrucasALeitz Ergolux
View Optical MicroscopePM02MetrologyFredric EricsonALeitz---
View Optical MicroscopePM03MetrologyRimantas BrucasAOlympus---
View Optical MicroscopePM17MetrologyÖrjan VallinBNikonEclipse ME600
View Optical microscopePL39LithographyRimantas BrucasAOlympusMX63
View Optical Microscope (mask insp.)PL35LithographyÖrjan VallinANikonEclips L200ND
View Parylene CoaterPD16Thermal processLena KlintbergAParatechLab Top 3000
View Pattern GeneratorPL32LithographyÖrjan VallinBHeidelbergDWL 200
View PC12 - wet bench - StanglPC12Wet process & preparationErnesto Vargas CatalánB--
View PCB plotterPB18Backend processLena KlintbergBLPKFS104
View Photomask ProcessorPL33LithographyÖrjan VallinBACPCapSpin
View Pick-&-Place (w. dispenser)PB06Backend processLena KlintbergALPKFProtoPlace S
View PL / EL Quantum YieldPM34MetrologyJonathan ScraggAEdinburgh InstrumentsFLS 1000 custom
View Plasma CleanerAT09Transmission electron microscopy (TEM)Amit PatelAFischione---
View Plasma EtcherPE08Dry etchBjörn KuzavasAPlasma EtchPE-100
View Plasmastripper "New Lower"PE12Dry etchÖrjan VallinATepla300
View Plasmastripper "Upper"PE04Dry etchÖrjan VallinBTepla300
View Plating Station - pulse (Cu)PC42Wet process & preparationSven NorénALPKFMiniContac-RS
View PolisherAT05Transmission electron microscopy (TEM)Amit PatelAStruersDAP-V
View PolisherAT16Transmission electron microscopy (TEM)Amit PatelABuehlerEcomet 3
View PolisherAP06Sample preparationAmit PatelBBuehlerMetaserv
View PolisherAP07Sample preparationAmit PatelBBuehlerPhoenix
View Resist FurnacePL18LithographyRimantas BrucasAHeraeus---
View Resist FurnacePB12Backend processLena KlintbergABinder---
View Resist Furnace (110 C)PL16LithographyRimantas BrucasAMemmert---
View Resist Furnace (90 C)PL15LithographyRimantas BrucasAMemmert---
View Resist LaminatorPB10Backend processLena KlintbergABungardRLM 419 p
View Resist LaminatorPB16Backend processLena KlintbergAMEGA Electronics305
View Resist spinnerPL38LithographyÖrjan VallinAPolosSPIN 150i
View RIE (SiO / SiN)PE06Dry etchÖrjan VallinCAdvanced VacuumVision 320
View RTPPD15Thermal processCS_Si ChenBMPTCRTP-600S
View SawAP02Sample preparationAmit PatelBBuehlerIsomet
View Saw - low speedAP01Sample preparationAmit PatelBBuehlerIsomet
View Screen PrinterPB07Backend processLena KlintbergALPKFProtoPrint S
View ScriberPB14Backend processJes LarsenBBosch---
View SEM/EDS - 1530AS06Scanning electron Microscopy (SEM)Amit PatelCCarl ZeissSEM
View SEM/EDS - 1550AS02Scanning electron Microscopy (SEM)Amit PatelCZeissLEO1550
View SEM/EDS/EBSD - MerlinAS05Scanning electron Microscopy (SEM)Fredric EricsonCZeissMerlin
View Solder FurnacePB09Backend processLena KlintbergALPKFProtoFlow S
View Spectroscopic ellipsometerPM33MetrologyCarl HägglundCWoollamRC2-XI
View Spectroscopic reflectometer "K-MAC"PM31MetrologyÖrjan VallinAK-MACST4000-DLX
View Spin CoaterPL08LithographyRimantas BrucasBSüss MicroTecLabSpin6
View Spin CoaterPL09LithographyRimantas BrucasBKarl SüssRC8 (Gyroset)
View Spin CoaterPL10LithographyRimantas BrucasBBLEDelta 10
View Spin-Rinse-DryerPC47Wet process & preparationAmit PatelA------
View Spin-Rinse-DryerPC53Wet process & preparationÖrjan VallinASemitool470S with 102 controller
View Spin-Spray CoaterPL31LithographyRimantas BrucasBEVG101
View Spray EtcherPC45Wet process & preparationLena KlintbergASolectro---
View Sputter - magnetron "Lesker"PT09Thin film depositionTomas KubartDKurt J. Lesker CompanyCMS-18
View Sputter - magnetron "Von Ardenne"PT01Thin film depositionTomas NybergDVon ArdenneCS 730S
View Sputter - magnetron ZnO/CZTSPT16Thin film depositionJonathan ScraggBVon ArdenneCS 600
View Sputter - table-topPT22Thin film depositionTomas NybergBQuorumQ300TD plus
View Sputter Coater - Au/PdAP16Sample preparationAmit PatelBPolaronSC7640
View Stereo MicroscopePM25MetrologyÖrjan VallinANikonC-LEDS
View Stylus Profiler "Dektak 150"PM22MetrologyTomas NybergABruker / VeecoDektak 150
View Stylus Profiler "DektakXT"PM32MetrologyTomas NybergADektakXT
View Sulfoselenisation Furnace (SuSe)PD20Thermal processJonathan ScraggB------
View Sulfoselenisation RTP (Bettan)PD21Thermal processJes LarsenBDSeTec-
View TCO sputterPT18Thin film depositionTomas KubartDvon ArdenneCS730
View TEM/EDS - TitanAT18Transmission electron microscopy (TEM)Fredric EricsonDFEITitan Themis 200
View Tube Furnace - pipe 1PD19Thermal processUwe ZimmermannATemprex---
View Ultrasonic CleanerAP33Sample preparationAmit PatelABranson5510
View Ultrasonic CleanerAT12Transmission electron microscopy (TEM)Amit PatelASonorex---
View Ultrasonic CleanerAP28Sample preparationAmit PatelAMetason50
View Ultrasonic Disc CutterAT04Transmission electron microscopy (TEM)Amit PatelAGatan601
View UV ExposurePB11Backend processLena KlintbergABungardHellas-E
View Vac. / Vap. Prime FurnacePL14LithographyRimantas BrucasBStar2000
View Vacuum Leak TesterPO01Other processesBjörn KuzavasAAdixenASM 142
View Vacuum storage (large)PO03Other processesCharlotte Platzer BjörkmanA--
View Vacuum storage (small)PO04Other processesCharlotte Platzer BjörkmanA--
View Vertical Furnace - LPCVD (poly-Si, a-Si)PD08Thermal processÖrjan VallinCKoyo LindbergMicro TF-6LP
View Vertical Furnace - LPCVD (Si3N4, SiNx)PD09Thermal processÖrjan VallinCKoyo LindbergMicro TF-6LP
View Vertical Furnace - LPCVD (TEOS oxide)PD10Thermal processÖrjan VallinCKoyo LindbergMicro TF-6LP
View Vertical Furnace (general purpose)PD03Thermal processÖrjan VallinBKoyo LindbergMicro TF-6
View Vertical Furnace (high temp anneal)PD05Thermal processÖrjan VallinBKoyo LindbergMicro TF-6
View Vertical Furnace (metal anneal)PD07Thermal processÖrjan VallinBKoyo LindbergMicro TF-6
View Vertical Furnace (oxidation)PD01Thermal processÖrjan VallinAKoyo LindbergMicro TF-6
View Vertical Furnace (oxidation)PD02Thermal processÖrjan VallinAKoyo LindbergMicro TF-6
View Wet Bench - free acid / acid drain (KOH)PC18Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench - acidPL23LithographyRimantas BrucasBStangl---
View Wet Bench - acidPL24LithographyRimantas BrucasBStangl---
View Wet Bench - acid drain, spin dryerPC22Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench - Megasonic cleaningPC10Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench - solvent cleaningPL27LithographyRimantas BrucasAStangl-
View Wet Bench - Ultrasonic cleaningPC11Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench - Water rinsePL26LithographyRimantas BrucasBStangl-
View Wet Bench - work deskPL25LithographyRimantas BrucasBStangl---
View Wet Bench (KOH / HF)PC19Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench (KOH-IPA / HF / warm rinse)PC20Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench (RCA1 / RCA2 / HF)PC03Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench (RCA1 / RCA2 / HF)PC04Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench / E-beam resist developmentPL22LithographyÖrjan VallinBStangl---
View Wet Bench / E-beam resist hot-platePL21LithographyÖrjan VallinBStangl---
View Wet Bench / E-beam resist spinnerPL20LithographyÖrjan VallinBStangl / PolosSPIN 150i
View Wet Bench Acid surface treatmentsPC02Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench Etch and stripPC01Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench Metal etchingPC09Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench Oxide etchingPC07Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench Piranha PC08Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench Resist lift-offPC06Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet Bench Solvent cleanPC05Wet process & preparationErnesto Vargas CatalánBStangl---
View Wet GrinderAP04Sample preparationAmit PatelBBuehlerMetaserv
View Wet GrinderAP05Sample preparationAmit PatelBBuehlerMetaserv
View Wire Bonder - ballPB19Backend processRimantas BrucasBKulicke & Soffa4524A Digital
View Wire Bonder - ballPB02Backend processRimantas BrucasBKulicke & Soffa4522
View Wire Bonder - wedgePB03Backend processRimantas BrucasBKulicke & Soffa4526
View X-Ray Inspection StationPM26MetrologyBjörn KuzavasBNikonXT V 130
View XRFAX03Chemical analysisTobias TörndahlBPanalyticalEpsilon 5
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