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 NameTool IdCategory1st responsibleTool rateManufacturerModel
View AFMAU04Surface analysisVictoria SternhagenBPSIAXE150
View ALDPT17Thin film depositionZhibin ZhangCPicosunR200
View ALD - F120PT15Thin film depositionTobias TörndahlEMicrochemistryF120
View ALD - MP3PT19Thin film depositionTobias TörndahlE--
View BalancePM19MetrologyFarhad ZamanyADenver InstrumentXL410D
View BalancePM20MetrologyFarhad ZamanyASartorusBP4100
View BalanceAP32Sample preparationJan-Åke GustafssonAMettlerToledo
View Bench-top Vacuum Glove BoxPC49Wet process & preparationZhibin ZhangEMTI Corporation---
View Bench-top Vacuum OvenPC46Wet process & preparationZhibin ZhangEMTI Corporation---
View CAD / conversion workstationPL29LithographyÖrjan VallinA------
View CIGS evaporator - BAKPT10Thin film depositionNina Shariati-NilssonEBaltzersBAK 550
View CIGS evaporator - M. PilotePT12Thin film depositionTobias TörndahlEVon Ardenne---
View CZTS sputterPT20Thin film depositionCharlotte Platzer BjörkmanE--
View Dicing SawPB01Backend processStefan NygrenBDiscoDAD 361
View Dimple GrinderAT06Transmission electron microscopy (TEM)Jan-Åke GustafssonAGatan656
View Dimple GrinderAT07Transmission electron microscopy (TEM)Jan-Åke GustafssonAGatan656
View Dip CoaterPC44Wet process & preparationLena KlintbergABungardRDC 21
View E-Beam evaporator - FlutterPT06Thin film depositionJan KellerEUU---
View E-beam/resisitive evaporator - BAPT14Thin film depositionNils RossEBaltzersBA
View Electron Beam Lithograph EBLPL37LithographyÖrjan VallinDNanoBeam Ltd.nB5
View Ellipsometer "Rudolph"PM12MetrologyAmit PatelBRudolph Research---
View EmbedderAP03Sample preparationJan-Åke GustafssonBBuehlerSimplimet
View ESCAAX01X-ray photoelectron spectroscopy (XPS)Jan-Åke GustafssonCPhysical Electronics (PHI)Quantum 2000
View ESCA IIAX02X-ray photoelectron spectroscopy (XPS)Jan-Åke GustafssonCPhysical ElectronicsQuantera II
View ESEM / (EBL)AS03Scanning electron Microscopy (SEM)Fredric EricsonCFEIXL30 ESEM
View Evaporator - cryo (restricted use)PT08Thin film depositionAmit PatelAKurt J. Lesker CompanyPVD 75
View Evaporator - TMP (general use)PT07Thin film depositionAmit PatelAKurt J. Lesker CompanyPVD 75
View Evaporator - UMSPT11Thin film depositionAdam HultqvistEBaltzersUMS
View Evaporator "Edwards"PT02Thin film depositionAmit PatelAEdwardsAuto 306 FL400
View Evaporator (C)AP17Sample preparationJan-Åke GustafssonBPolaron---
View Ex-situ ManipulatorAT14Transmission electron microscopy (TEM)Jan-Åke GustafssonAMitutoyo---
View FIB / SEM / EDS / CryoAF01Focused ion beam (FIB)Fredric EricsonDFEIStrata DB235
View Four Point Probe - automaticPM21MetrologyAmit PatelAAITCMT-SR2000N
View Fume hood – acidsFC09Wet process & preparationFarhad ZamanyA--
View Fume Hood - CBDPC48Wet process & preparationJonathan ScraggE------
View Fume Hood – KCNPC51Wet process & preparationJonathan ScraggE--
View Fume hood – solventsFC06Wet process & preparationFarhad ZamanyA--
View FurnaceAT15Transmission electron microscopy (TEM)Jan-Åke GustafssonAHeraeus---
View Glass substrate cleanerPC52Wet process & preparationNina Shariati-NilssonASemitool-
View Hot PlateAT13Transmission electron microscopy (TEM)Jan-Åke GustafssonAHeidolphMR3003
View Hot PlateAP31Sample preparationJan-Åke GustafssonAHeidolphMR3003
View Hot PlatePL11LithographyRimantas BrucasABLEBM Delta 150
View Hot PlatePL12LithographyRimantas BrucasABLEBM Delta 150
View Hot PlatePL13LithographyRimantas BrucasABLE---
View Hot PlatePC34Wet process & preparationFarhad ZamanyAGWMCK
View Hot PlatePC35Wet process & preparationFarhad ZamanyAPM Plast---
View Hot Plate / Magnetic StirrerPC36Wet process & preparationFarhad ZamanyAIKABasic C
View HT Furnace - atmPD17Thermal processLena KlintbergAThermolyne---
View Hydraulic Press (w. heater)PB08Backend processLena KlintbergABungardRMP 210
View ICP-RIE (Si-DRIE / aluminum etch)PE01Dry etchLeif KuzavasDPlasmaThermSLR
View ICP-RIE (Si-DRIE) "Tegal"PE07Dry etchLeif KuzavasDTegal110 S/DE
View Image Reversal / Vapor Prime FurnacePL36LithographyRimantas BrucasAYield Engineering SystemsYES-58TA-E
View Ink Jet PrinterPB13Backend processZhibin ZhangBFuji FilmDimatix 2831
View Ion Beam EtcherPE10Dry etchLeif KuzavasAMSL-LKMark 1
View Ion Mill PIPSAT08Transmission electron microscopy (TEM)Jan-Åke GustafssonAGatanPIPS model 691
View Ion Polisher IlionAP34Sample preparationFredric EricsonAGatanllion II
View IR cameraPM18MetrologyÖrjan VallinAHamamatsuC2742
View Jet SpinnerPC32Wet process & preparationFarhad ZamanyALaurell---
View Laminar Flow Hood I (big Holten, left)X101Other processesGry Hulsart BillströmEHoltenSafe 2010 1.8
View Laminar Flow Hood II (Kojair, right front)X102Other processesGry Hulsart BillströmEKojairOrion S-125 Safety
View Laminar Flow Hood III (small Holten, right back)X103Other processesGry Hulsart BillströmEHoltenHB 2448 1.2
View Mask Aligner - front / back side alignPL03LithographyRimantas BrucasCKarl SüssMA6 / BA6
View Mask Aligner - front side alignPL04LithographyRimantas BrucasCKarl SüssMA6
View Measurement StationPM27MetrologyÖrjan VallinANational InstrumentsNI92xx
View Measuring Microscope with Digital ReadoutPM24MetrologyÖrjan VallinANikon/MetronicsMM-40/Quadra Chek 200
View Mo sputter - MRC IIPT13Thin film depositionCharlotte Platzer BjörkmanEMRC---
View NanoimprinterPL30LithographyRimantas BrucasDObducatNIL-6
View NanoindenterAU06Surface analysisUrban WiklundECSMUNHT
View Optical MicroscopePM30MetrologyRimantas BrucasALeitzSecolux 6x6
View Optical MicroscopePM01MetrologyÖrjan VallinALeitz Ergolux
View Optical MicroscopePM02MetrologyÖrjan VallinALeitz---
View Optical MicroscopePM03MetrologyRimantas BrucasAOlympus---
View Optical MicroscopePM04MetrologyÖrjan VallinANikonOptiphot
View Optical MicroscopePM05MetrologyÖrjan VallinANikonSMZ1B
View Optical MicroscopePM17MetrologyÖrjan VallinBNikonEclipse ME600
View Optical MicroscopeAT10Transmission electron microscopy (TEM)Jan-Åke GustafssonAReichert---
View Optical MicroscopeAT11Transmission electron microscopy (TEM)Jan-Åke GustafssonAReichert---
View Optical Microscope - inverted, "Reichert"AU05Surface analysisVictoria SternhagenAReichertMEF4M
View Optical Microscope "Olympus"AU03Surface analysisVictoria SternhagenAOlympusAX70
View Optical Microscope (mask insp.)PL35LithographyÖrjan VallinANikonEclips L200ND
View Optical Microscope I (right)X104Other processesGry Hulsart BillströmENikonEclipse TE2000-U
View Optical Microscope II (left)X105Other processesGry Hulsart BillströmENikonEclipse TE300
View Optical Profiler WYKOAU01Surface analysisVictoria SternhagenAVeeco / WYKONT1100
View Parylene CoaterPD16Thermal processLena KlintbergAParatechLab Top 3000
View Pattern GeneratorPL32LithographyÖrjan VallinBHeidelbergDWL 200
View PC12 - wet bench - StanglPC12Wet process & preparationFarhad ZamanyB--
View PCB PlotterPB05Backend processLena KlintbergBLPKFProtoMat S100
View PECVDPT04Thin film depositionTobias TörndahlEOxford133
View Photomask ProcessorPL33LithographyÖrjan VallinEACPCapSpin
View Pick-&-Place (w. dispenser)PB06Backend processLena KlintbergALPKFProtoPlace S
View Plasma CleanerAT09Transmission electron microscopy (TEM)Jan-Åke GustafssonAFischione---
View Plasma EtcherPE08Dry etchStefan NygrenAPlasma EtchPE-100
View Plasmastripper "Upper"PE04Dry etchLeif KuzavasBTepla300
View Plate ReaderX106Other processesGry Hulsart BillströmETecanInfinite 200 PRO
View Plating Station - pulse (Cu)PC42Wet process & preparationStefan NygrenALPKFMiniContac-RS
View Plating Station (Ni/Sn)PC43Wet process & preparationStefan NygrenA------
View PolisherAT05Transmission electron microscopy (TEM)Jan-Åke GustafssonAStruersDAP-V
View PolisherAP06Sample preparationJan-Åke GustafssonBBuehlerMetaserv
View PolisherAP07Sample preparationJan-Åke GustafssonBBuehlerPhoenix
View PolisherAT16Transmission electron microscopy (TEM)Jan-Åke GustafssonABuehlerEcomet 3
View Resist FurnacePB12Backend processStefan NygrenABinder---
View Resist FurnacePL18LithographyRimantas BrucasAHeraeus---
View Resist FurnacePL19LithographyRimantas BrucasAUUU-båten
View Resist Furnace (110 C)PL16LithographyRimantas BrucasAMemmert---
View Resist Furnace (90 C)PL15LithographyRimantas BrucasAMemmert---
View Resist LaminatorPB16Backend processStefan NygrenAMEGA Electronics305
View Resist LaminatorPB10Backend processLena KlintbergABungardRLM 419 p
View Resist spinnerPL38LithographyÖrjan VallinAPolosSPIN 150i
View RIE (SiO / SiN)PE06Dry etchLeif KuzavasCAdvanced VacuumVision 320
View RTPPD15Thermal processJörgen OlssonBMPTCRTP-600S
View SawAP02Sample preparationJan-Åke GustafssonBBuehlerIsomet
View Saw - low speedAP01Sample preparationJan-Åke GustafssonBBuehlerIsomet
View Screen PrinterPB07Backend processLena KlintbergALPKFProtoPrint S
View ScriberPB14Backend processJes LarsenEBosch---
View SEM "1530"AS06Scanning electron Microscopy (SEM)Victoria SternhagenCCarl ZeissSEM
View SEM / EDS "1550"AS02Scanning electron Microscopy (SEM)Victoria SternhagenCZeissLEO1550
View SEM / EDS "440"AS01Scanning electron Microscopy (SEM)Jan-Åke GustafssonBZeissLEO440
View SEM / EDS / EBSD "Merlin"AS05Scanning electron Microscopy (SEM)Fredric EricsonCZeissMerlin
View ShakerPC37Wet process & preparationFarhad ZamanyAHeidolphRotmax 120
View ShakerPC38Wet process & preparationFarhad ZamanyAHeidolphRotmax 120
View ShakerPC39Wet process & preparationFarhad ZamanyATilertek---
View Solder FurnacePB09Backend processLena KlintbergALPKFProtoFlow S
View Spectroscopic reflectometer "K-MAC"PM31MetrologyÖrjan VallinAK-MACST4000-DLX
View Spin CoaterPL08LithographyRimantas BrucasBBLEDelta 20
View Spin CoaterPL09LithographyRimantas BrucasBKarl SüssRC8 (Gyroset)
View Spin CoaterPL10LithographyRimantas BrucasBBLEDelta 10
View Spin-Rinse-DryerPC41Wet process & preparationFarhad ZamanyASemitool870S
View Spin-Rinse-DryerPC47Wet process & preparationAmit PatelE------
View Spin-Spray CoaterPL31LithographyRimantas BrucasBEVG101
View Spray EtcherPC45Wet process & preparationLena KlintbergASolectro---
View Sputter - magnetron "Lesker"PT09Thin film depositionTomas KubartDKurt J. Lesker CompanyCMS-18
View Sputter - magnetron "Von Ardenne"PT01Thin film depositionAmit PatelDVon ArdenneCS 730S
View Sputter - magnetron ZnO/CZTSPT16Thin film depositionAmit PatelEVon ArdenneCS 600
View Sputter - table-topPT05Thin film depositionAmit PatelBEmitech-
View Sputter Coater (Au / Pd)AP16Sample preparationJan-Åke GustafssonBPolaron---
View Stereo MicroscopePM25MetrologyÖrjan VallinANikonC-LEDS
View Stress MeterPM10MetrologyAmit PatelBFSM500TC
View Stylus Profiler "Dektak 150"PM22MetrologyAmit PatelABruker / VeecoDektak 150
View Stylus Profiler "DektakXT"PM32MetrologyAmit PatelADektakXT
View Sulfoselenisation Furnace (SuSe)PD20Thermal processJonathan ScraggE------
View Sulfoselenisation RTP (Bettan)PD21Thermal processJes LarsenADSeTec-
View TEMAT01Transmission electron microscopy (TEM)Klaus LeiferCJEOL2000 FXII
View TEM / EDS / EELS TecnaiAT02Transmission electron microscopy (TEM)Fredric EricsonDFEITecnai F30 ST
View TEM / EDS TitanAT18Transmission electron microscopy (TEM)Fredric EricsonDFEITitan Themis 200
View Tube Furnace - pipe 1PD19Thermal processUwe ZimmermannETemprex---
View Ultrasonic BathPC40Wet process & preparationFarhad ZamanyABranson---
View Ultrasonic CleanerAT12Transmission electron microscopy (TEM)Jan-Åke GustafssonASonorex---
View Ultrasonic CleanerAP28Sample preparationJan-Åke GustafssonAMetason50
View Ultrasonic CleanerAP33Sample preparationJan-Åke GustafssonABranson5510
View Ultrasonic Disc CutterAT04Transmission electron microscopy (TEM)Jan-Åke GustafssonAGatan601
View Ultrasonic HomogenizerPC50Wet process & preparationZhibin ZhangEBandelinHD 2200
View UV ExposurePB11Backend processLena KlintbergABungardHellas-E
View Vac. / Vap. Prime FurnacePL14LithographyRimantas BrucasBStar2000
View Vacuum Leak TesterPO01Other processesBjörn KuzavasAAdixenASM 142
View Vacuum storage (large)PO03Other processesCharlotte Platzer BjörkmanE--
View Vacuum storage (small)PO04Other processesCharlotte Platzer BjörkmanE--
View Vertical Furnace - LPCVD (poly-Si)PD08Thermal processLeif KuzavasCKoyo LindbergMicro TF-6LP
View Vertical Furnace - LPCVD (SiN)PD09Thermal processLeif KuzavasCKoyo LindbergMicro TF-6LP
View Vertical Furnace - LPCVD (TEOS oxide)PD10Thermal processLeif KuzavasCKoyo LindbergMicro TF-6LP
View Vertical Furnace (general purpose)PD03Thermal processLeif KuzavasBKoyo LindbergMicro TF-6
View Vertical Furnace (high temp anneal)PD05Thermal processLeif KuzavasBKoyo LindbergMicro TF-6
View Vertical Furnace (metal anneal)PD07Thermal processLeif KuzavasBKoyo LindbergMicro TF-6
View Vertical Furnace (oxidation)PD01Thermal processLeif KuzavasAKoyo LindbergMicro TF-6
View Vertical Furnace (oxidation)PD02Thermal processLeif KuzavasAKoyo LindbergMicro TF-6
View Wet Bench - free acid / acid drain (KOH)PC18Wet process & preparationFarhad ZamanyBStangl---
View Wet Bench - acidPL23LithographyRimantas BrucasBStangl---
View Wet Bench - acidPL24LithographyRimantas BrucasBStangl---
View Wet Bench - heating bathPC24Wet process & preparationFarhad ZamanyBStangl---
View Wet Bench - heating bathPC26Wet process & preparationFarhad ZamanyBStangl---
View Wet Bench - heating bath acidPC22Wet process & preparationFarhad ZamanyBStangl---
View Wet Bench - high temp acidPC23Wet process & preparationFarhad ZamanyBStangl---
View Wet Bench - high temp acidPC21Wet process & preparationFarhad ZamanyBStangl---
View Wet Bench - hot platePC27Wet process & preparationFarhad ZamanyBStangl---
View Wet Bench - Megasonic cleaningPC10Wet process & preparationFarhad ZamanyBStangl---
View Wet Bench - solvent cleaningPL27LithographyRimantas BrucasAStangl-
View Wet Bench - Ultrasonic cleaningPC11Wet process & preparationFarhad ZamanyBStangl---
View Wet Bench - Water rinsePL26LithographyRimantas BrucasBStangl-
View Wet Bench - work deskPL25LithographyRimantas BrucasBStangl---
View Wet Bench (acetone / toluene / IPA)PC29Wet process & preparationFarhad ZamanyBStangl---
View Wet Bench (acetone)PC25Wet process & preparationFarhad ZamanyBStangl---
View Wet Bench (KOH / HF)PC19Wet process & preparationFarhad ZamanyBStangl---
View Wet Bench (KOH-IPA / HF / warm rinse)PC20Wet process & preparationFarhad ZamanyBStangl---
View Wet bench (RCA1 / RCA2 / HF)PC14Wet process & preparationFarhad ZamanyB--
View Wet Bench (RCA1 / RCA2 / HF)PC03Wet process & preparationFarhad ZamanyBStangl---
View Wet Bench (RCA1 / RCA2 / HF)PC04Wet process & preparationFarhad ZamanyBStangl---
View Wet Bench (RCA1 / RCA2 / HF)PC28Wet process & preparationFarhad ZamanyBStangl---
View Wet Bench (triton / HF / BHF / developer)PC30Wet process & preparationFarhad ZamanyBStangl---
View Wet Bench / E-beam resist developmentPL22LithographyÖrjan VallinBStangl---
View Wet Bench / E-beam resist hot-platePL21LithographyÖrjan VallinBStangl---
View Wet Bench / E-beam resist spinnerPL20LithographyÖrjan VallinBStangl / PolosSPIN 150i
View Wet Bench 7-upPC08Wet process & preparationFarhad ZamanyBStangl---
View Wet Bench Acid surface treatmentsPC02Wet process & preparationFarhad ZamanyBStangl---
View Wet Bench Etch and stripPC01Wet process & preparationFarhad ZamanyBStangl---
View Wet Bench Metal etchingPC09Wet process & preparationFarhad ZamanyBStangl---
View Wet Bench Oxide etchingPC07Wet process & preparationFarhad ZamanyBStangl---
View Wet Bench Resist lift-offPC06Wet process & preparationFarhad ZamanyBStangl---
View Wet Bench Solvent cleanPC05Wet process & preparationFarhad ZamanyBStangl---
View Wet GrinderAP04Sample preparationJan-Åke GustafssonBBuehlerMetaserv
View Wet GrinderAP05Sample preparationJan-Åke GustafssonBBuehlerMetaserv
View Wet grinderAT17Transmission electron microscopy (TEM)Jan-Åke GustafssonAStruersDAP V
View Wire Bonder - ballPB02Backend processLeif KuzavasBKulicke & Soffa4522
View Wire Bonder - wedgePB03Backend processStefan NygrenBKulicke & Soffa4526
View X-Ray Inspection StationPM26MetrologyBjörn KuzavasBNikonXT V 130
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