Picture of Mask Aligner - front / back side align
Current status:
AVAILABLE
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Karl Süss MA6/BA6 double sided exposure spec: resist type + thickness

Tool name:
Mask Aligner - front / back side align
Area/room:
3R81 - Lithography
Category:
Lithography
Manufacturer:
Karl Süss
Model:
MA6 / BA6
Max booking time, day:
3 hours
Max booking time, night:
4 hours
No. of future bookings:
4

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