Picture of Wet Bench / E-beam resist spinner
Current status:
AVAILABLE
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Tool name:
Wet Bench / E-beam resist spinner
Area/room:
3R81 - Lithography
Category:
Lithography
Manufacturer:
Stangl / Polos
Model:
SPIN 150i
Max booking time, day:
3 hours
Max booking time, night:
4 hours
No. of future bookings:
4

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