Picture of Mo sputter - MRC II
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Inline sputter (i-ZnO, ZnO:Al, Mo, Mo:Na).

System for deposition of Mo, ZnO and ZnO(Al).

DC and pulsed DC magnetron sputter with three target positions. Pinnacle Plus power supply. Max substrate size 30x27.5 cm2.

Tool name:
Mo sputter - MRC II
Area/room:
3R07 - FTE PV
Category:
Thin film deposition
Manufacturer:
MRC
Model:
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hours
Max booking time, night:
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