Picture of ALD - MP3
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Atomic layer deposition of ZnO1-xSx.

Max substrate size 12.5x12.5 cm2.

Tool name:
ALD - MP3
Area/room:
[Not defined]
Category:
Thin film deposition
Manufacturer:
-
Model:
-
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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