Picture of Photomask Processor
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Örjan Vallin
2nd Responsible:
Rimantas Brucas
Files
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Description
Details
Tool name:
Photomask Processor
Area/room:
3R84n - maskgenerering
Category:
Lithography
Manufacturer:
ACP
Model:
CapSpin
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Tool Modes
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