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Hot Plate (PL11)

Picture of Hot Plate

Current status:

AVAILABLE

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Responsibles

1st Responsible:

Rimantas Brucas

2nd Responsible:

Files

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Description

Hotplate for photoresist bake.

Details

Tool name:

Hot Plate

Area/room:

3R81 - litografi

Category:

Lithography

Manufacturer:

Süss MicroTec

Model:

HP8 BM

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