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Mask Aligner - front / back side align (PL03)

Current status:

AVAILABLE

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Responsibles

1st Responsible:

Rimantas Brucas

2nd Responsible:

Files

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Description

Karl Süss MA6/BA6 double sided exposure spec: resist type + thickness

Details

Tool name:

Mask Aligner - front / back side align

Area/room:

3R81 - litografi

Category:

Lithography

Manufacturer:

Karl Süss

Model:

MA6 / BA6

Tool Modes

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