Picture of Vertical Furnace (oxidation)
Current status:
AVAILABLE
Book | Log
Show/Collapse all

1st Responsible:
2nd Responsible:
You must be logged in to view files.

Koyo oxidation / anneal (no KOH exposure) dryox900C / dryox1050C / wetox

Gases: N2 (GA010), N2 (GA012), O2 (GA051), H2 (GA041)

Tool name:
Vertical Furnace (oxidation)
Area/room:
3R76o - diffusion (HT-proc)
Category:
Thermal process
Manufacturer:
Koyo Lindberg
Model:
Micro TF-6

Instructors

Licensed Users

You must be logged in to view tool modes.