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Vertical Furnace (oxidation) (PD01)

Current status:

AVAILABLE

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Responsibles

1st Responsible:

Örjan Vallin

2nd Responsible:

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Description

Koyo oxidation / anneal (no KOH exposure) dryox900C / dryox1050C / wetox

Gases: N₂ (GA010), N₂ (GA012), O₂ (GA051), H₂ (GA041)

Details

Tool name:

Vertical Furnace (oxidation)

Area/room:

3R76o - diffusion (HT-proc)

Category:

Thermal process

Manufacturer:

Koyo Lindberg

Model:

Micro TF-6

Tool Modes

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