Basic information

The PHI 710 Scanning Auger Nanoprobe is a surface analysis instrument that combines chemical analysis (AES) and imaging (SEM), which provide elemental and chemical state analysis with nanometer-scale spatial resolution. It is equipped with an argon ion gun, allowing for sputter depth profiling and surface cleaning (presputtering), and an EDS detector as an additional tool for chemical analysis. 

Technical specification

• Electron source: coaxial Schottky thermal field emission electron gun
• Acceleration voltage:  1 - 25 kV
• 5-axis (x, y, z, tilt and rotation) motorized sample stage
• Cylindrical mirror analyzer (CMA) in coaxial geometry to reduce shadowing effects
• Secondary electron imaging
• Ion gun for presuttering (Ar+) and depth profiling, energy range: 0.5-5 keV
• High energy resolution (HERO) module
• SmartSoft-Auger instrument control software
• Multipak data treatment software
• Ion pumped analysis chamber
• Intro camera
• EDS detector

Performance

• AES spatial resolution: 8 nm 
• AES surface sensitivity: 1-10nm
• Can detect all elements above He
• Concentration detection limit: 0.1 at.%
• SEM spatial resolution: 3 nm (25 kV)

Restrictions

• For standard sample holder: max sample size: 20 x 20 mm and max thickness 6 mm
• Samples must be compatible with ulta high vacuum