Picture of UHV-PVD
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Rimantas Brucas
2nd Responsible:
Files
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Description
Details
Tool name:
UHV-PVD
Area/room:
3R11 - UHV-PVD
Category:
Thin film deposition
Manufacturer:
Prevac
Model:
N/A
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Instructors

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Tool Modes
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