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EBL (e-beam litho) - JEOL (PL40)

Picture of EBL (e-beam litho) - JEOL

Current status:

AVAILABLE

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Responsibles

1st Responsible:

Örjan Vallin

2nd Responsible:

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Description

Installation accepted 2024-10-14

Details

Tool name:

EBL (e-beam litho) - JEOL

Area/room:

3R84 - EBL (e-strålelitografi)

Category:

Lithography

Manufacturer:

JEOL Ltd.

Model:

JBX-8100FS

Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes

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