Spin-Rinse-Dryer for 100 mm and 150 mm wafer cassettes
Make sure to use the correct cassette: for 100 mm the cassette should have an U-shaped front.
Cassettes are normally stored in their respective rotor.
The unused rotor is normally stored on top of machine, together with the T-handled Allen key.
User Instruction:
Turn on N2 valve on the wall
Turn on power
Change rotor if neccessary (see below)
Pre-rincse cassette with wafers in the wet bench
Load casette
Press start
Unload cassette
Put empty cassette back and turn off power and N2
Changing rotor:
Take out cassette and unscrew centre hex screw with supplyed T-handle Allen key.
Pull out rotor and put on top of machine.
Put in the wanted rotor and screw back the screw. Do not overtighten the screw.