Picture of Plasmastripper "New Lower"
Current status:
AVAILABLE
Book | Log
Show/Collapse all

1st Responsible:
2nd Responsible:
You must be logged in to view files.

Tepla 300

The Tepla 300 is a barrel reactor using microwave power. It is intended for de-scum and stripping (aka ashing) of resist.

There are several recipes for stripping and de-scum.

Gases: N2 (GA012), O2 (GA051).

Tool name:
Plasmastripper "New Lower"
Area/room:
3R44 - ets / tunnfilm
Category:
Dry etch
Manufacturer:
Tepla
Model:
300

Instructors

Licensed Users

You must be logged in to view tool modes.