Picture of Ion Beam Etcher
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Örjan Vallin
2nd Responsible:
Rimantas Brucas
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Description

The Ion Beam Etcher PE11

Gases: N2 (GA012), Ar? (GA021)

Details
Tool name:
Ion Beam Etcher
Area/room:
3R74 - jonets / solgel spinning
Category:
Dry etch
Manufacturer:
Scientific Vacuum Systems
Model:
i6000 Milling System
Process info

Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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