Picture of Ion Beam Etcher
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Björn Kuzavas
2nd Responsible:
Files
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Description

Tool normally off. Turn on at use.

Details
Tool name:
Ion Beam Etcher
Area/room:
3R44 - ets / tunnfilm
Category:
Dry etch
Manufacturer:
MSL-LK
Model:
Mark 1
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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