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SEM – Zeiss LEO 1530 with Oxford AZtec EDS system

High resolution FEG SEM for surface imaging equipped with an EDS system for element analysis. Equipped with InLens, SEII, and BSD detectors.


  • Schottky FEG with high current mode
  • Acceleration voltage range: 0.2 – 30 kV, Beam deceleration providing excellent low kV imaging
  • Resolution: 1nm at 20kV, 3nm at 1kV
  • Magnification: 20-900000x
  • InLens SE detector
  • Everhar-Thornley SE/BSE detector
  • Four-Quadrant BSE detector
  • EDS
    • 80mm2 Silicon Drift Detector with high sensitivity and for analysis at high count rates
    • 8.5 mm analytical working distance
    • Oxford AZtec (INCA energy) software for X-ray mapping and element analysis
  • 5-axis stage: motorized x, y, z, and rotation, manual tilt

The samples must be compatible with high vacuum.

Outgassing samples must be pre-pumped in a separate pumping system.

Powder samples must me prepared with care to avoid contamination of the gun column.

Tool name:
SEM/EDS - 1530
Area/room:
3R59 - ESCA / SEM
Category:
Scanning electron Microscopy (SEM)
Manufacturer:
Carl Zeiss
Model:
SEM

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