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Sputter-RTA platform (BERTHA) (PT20)

Current status:

AVAILABLE

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Responsibles

1st Responsible:

Jonathan Scragg

2nd Responsible:

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Description

Co-sputtering of metal elements with attached rapid thermal sulfurisation reactor

Details

Tool name:

Sputter-RTA platform (BERTHA)

Area/room:

3R09 - FTE PV

Category:

Thin film deposition

Manufacturer:

Model:

Tool Modes

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