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ALD - MP3 (PT19)

Current status:

AVAILABLE

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Responsibles

1st Responsible:

Tobias Törndahl

2nd Responsible:

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Description

Separate tool owner - Restricted access - Contact tool responsible

Atomic layer deposition of ZnO_1-xS_x.

Max substrate size 12.5x12.5 cm².

Details

Tool name:

ALD - MP3

Area/room:

[Not defined]

Category:

Thin film deposition

Manufacturer:

Model:

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